CVD Tube Furnace System
CVD Tube Furnace System

CVD Tube Furnace System

3 zone split tube furnace OD100mm tubular furnace
Temperature:1200C
Heating zone:φ100mm*200+200+200mm
Tube material:High purity Quartz tube
Open door:slipt type
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Products Description

CVD Tube Furnace System is a split tube furnace, use a quartz tube with an outer diameter of 100mm. Three temperature zones are independently controlled. Compact structure, double-layer air-cooled carbon steel structure, shell temperature not exceeding 50 degrees. The CVD tube furnace system adopts an intelligent programmable temperature control instrument touch screen, which can set heating and cooling programs, and can set and save multiple programs, with 50 segments per program. It is specifically used for sintering annealing, material synthesis, and other heat treatments in laboratories such as universities and research institutions.

 

Technical parameters

 

CVD Tube Furnace System

Model SK2-XY-12TP
Max.design(℃) 1200
Working temperature(℃) 0-1100

Tube diameter(mm)

D x W x H (mm)

100mm
Heating zone length(mm) 200+200+200mm
Voltage(V) 220V 1phase
Thermocouple type K
Max.vacuum -0.1MPa
Heating rate 0-20C/min
Temp.Precision ±1℃
Furnace chamber material 1430℃ grade Alumina ceramic firber refractory chamber
Inlet gas/Atmosphere Can be filled with all inert gases, mixed gases, etc. The equipment can be customized with multiple inlet ports and flow control meters, with a maximum positive pressure not exceeding 0.02Mpa
Gas control The product in the picture has an air inlet and an exhaust hole with a ball valve. Both ends can be connected to a vacuum pump or a flow meter can be added.
Sealing way The equipment casing is made of carbon steel and 304 stainless steel flange, which is openable and easy to install and remove. The casing is resistant to oxidation, acid and alkali, and has double sealing.
Temperature control security CVD Tube Furnace System adopts touch screen control, three-way independent temperature control, USB interface can export all stored data, and multiple programs can be saved. Each program can set 50 sets of temperature and time.
Temperature controller Touch screen model. Adopting advanced temperature instruments, 50 segment programs can be set, with high temperature control accuracy,SSR control, PID parameter self-tuning function; program temperature rise, program heat preservation, program cooling

Standard Accessories

Quartz tube|SS flange|vacuum pump|Thermal gloves | Crucible Tongs | Thermocouple | User Manual |Tools |

Certification: CE, ISO, SGS ect, more than 30 patent certifications
Warranty: One-year warranty (excluding wearing parts) and long-term technical support

 

 

Product details
CVD tube furnace system 41CVD tube furnace system170mm tube furnace 4
 
Company introduction

 

We are High temperature furnace experts

The company is recognized as a world leader in lab high temperature electric furnace design and offers products and services of exceptional quality.

  • 1K +
    Completed Projects
    1k complete work
  • 30 +
    Our Expert
    Expert high temperature furnace
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Certification

 

Honor and qualification
 
 

Official certification, professional after sales service.

product-788-1126

CE

product-1012-1452

CE

product-790-1124

CE

product-1754-2480

ISO9001

product-1896-2556

SGS

Precautions for use:
The gas pressure in the furnace tube cannot be higher than 0.02MPa
·Due to the high gas pressure inside the gas cylinder, a pressure reducing valve must be installed on the gas cylinder when the gas is introduced into the furnace tube. To ensure safety, it is recommended to use a pressure lower than 0.02MPa. It is recommended to purchase a pressure reducing valve from our company. The range of our company's pressure reducing valve is 0.01MPa-0.1MPa, which will be more accurate and safe when used. When the furnace body temperature is higher than 1000℃, the furnace tube cannot be in a vacuum state, and the gas pressure in the furnace tube must be equivalent to atmospheric pressure.
·The gas flow rate entering the furnace tube must be less than 200SCCM to avoid the impact of cold air flow on the heated quartz tube.
·The long-term use temperature of the quartz tube is <1100℃.
·For the experiment of sample heating, it is not recommended to close the exhaust valve and the air inlet valve at the flange end of the furnace tube. If you need to close the gas valve to heat the sample, you need to pay attention to the pressure gauge at all times. If the pressure reading is greater than 0.02MPa, you must immediately open the air relief valve to prevent accidents (such as furnace tube rupture, flange flying out, etc.)

 

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