Feature
● Max temperature RT~1200℃
● Split type of furnace, you can open the furnace.
● Can introduce more than 2 channels of gas, with a vacuum degree of 10Pa using a mechanical pump and a 500W RF power supply to enhance the signal.
● High quality performance alumina ceramic fiber insulation materials
● Temperature control accuracy ±1℃
● With over temperature alarm function
● Cooling fan can reduce the temperature of the casing
Model |
SK2-CVD-12TPB4 |
Dimensions: Standard Heating zone length (mm) |
440mm |
Dimensions: Standard Tube diameter (mm) |
∮60mm |
Max.temperature |
1200℃, Continuous working temperature 1100℃. |
Voltage(V) |
220 1P |
Thermocouple type |
K |
Heating element |
HRE Alloy resistance wire |
Temp.Precision |
±1℃ |
Heating rate |
0-30℃/min free adjustment |
Chamber material |
Using advanced high-quality alumina microcrystalline fiber material |
Furnace structure |
Double-layer air-cooled structure, surface temperature is less than 60℃ |
Temperature controller |
Intelligent PID temperature control instrument, 30 program segments, SSR control, PID parameter self-tuning function; program temperature rise, program heat preservation, program cooling |
500W RF power supply |
Output power: 5-500W ±1°C RF frequency: 13.56MHz ±0.005% Reflected power: up to 100W Match: Automatic RF interface: 50Ω, N-type Cooling: air cooling Power supply: AC 208-240V, 50/60HZ |
4 gas channel precision flow system |
1. Full scale flow rate(5, 10, 30, 50, 100, 200, 300, 500)ML/min. 10L/min. 2. Valve type: Solenold valve. 3. Valve rest position: Normally close. 4. Differential pressure: (50-300)kpa 5. Pressure resistance: 3mpa. 6. Operation temperature: 5-45℃ 7. Materials: stainless steel 316L. |
Vacuum system |
5*10-3Pa KF25 quick connect, stainless steel bellows, manual flapper valve and flange, vacuum pum Higher vacuum systems can also be optionally equipped. |
WELCOME OEM/ODM |
Standard Accessories
Thermal gloves | Crucible hook | Thermocouple | Tube Block | User Manual |Tools | Vacuum pump| Quartz tube |Flange |Sealing ring |10mm gas hose |Flange support, Gas system, RF power.
Optional
Different heating zone for your choose;
LCD touch screen control for choose
RS485/USB port to connect computer for choose.
Detail picture for CVD-PECVD



Application
This device is mainly used for growing nanowires or preparing various thin film growth using CVD method.
Warranty
One year warranty and lifelong technical support
Special tips:
1. Consumables such as heating element, quartz tube, sample crucible, etc. are not within the warranty period.
2. Damage caused by the use of corrosive gas and acid gas is not covered by the warranty.
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