Products Description
CVD tube furnace is composed of a tubular heating furnace, MFC gas system and vacuum system. The heating furnace uses high-quality alumina ceramic fiberboard and resistance wire heating elements to ensure temperature uniformity. Customers can choose different specifications and sizes according to different needs. Three or more atmospheres can be precisely controlled, and the vacuum degree can be selected from -0.1Mpa, 10pa, 10-3Pa, 10-4Pa and other vacuum degrees.
CVD tube furnace (Chemical Vapor Deposition) is a common heat treatment equipment, mainly used for high-temperature atmosphere sintering, atmosphere reduction, CVD/CVI experiments in colleges and universities, research institutes, industrial and mining enterprises, and is particularly suitable for vacuum coating, nano-film material preparation, nanowire growth, battery material drying and sintering, etc.
It is an important equipment that converts substances into solid films through certain chemical reactions under high temperature conditions. It is widely used in materials science research, energy, electronics, national defense and other fields.
Technical parameters
Debinding and sintering furnace
| Model | SK2-12TPCVD |
| Max.design(℃) | 1200 |
| Working temperature(℃) | 0-1100 |
|
Tube diameter(mm) D x W x H (mm) |
40/60/80/100/120/150/200/250/300mm optional or customized |
| Heating zone length(mm) | 205/350/440mm optional or customized |
| Voltage(V) | 220V 1phase |
| Thermocouple type | K |
| Max.vacuum | -0.1Mpa |
| Heating rate | 0-20C/min |
| Temp.Precision | ±1℃ |
| Furnace structure | Double-layer air-cooled structure, surface temperature is less than 60℃ |
| Furnace chamber material | 1430℃ grade Alumina ceramic firber refractory chamber |
| Inlet gas/Atmosphere | It can be filled with various protective or destructive gases,Inert gases, mixed gases, nitrogen, oxygen, etc,The maximum positive pressure does not exceed 0.02Mpa |
| Gas control | Three MSC gas channels,Flow rate 0-500sccm, each channel corresponds to a display screen, and the flow is precisely controlled by a solenoid valve |
| Sealing way | Adopt 304 stainless steel flange, with easy loading and unloading, oxidation resistance, acid and alkali resistance, double seal, ensure the sealing |
| Temperature control security | The electric furnace adopts integrated circuit, module control, double circuit protection (partial temperature protection, ultra-high temperature protection, coupling protection, overcurrent protection, overpressure protection and other protection functions) to make the electric furnace work stable and reliable, safe. |
| Vacuum system | Single-stage rotary vane pump, bipolar mechanical pump, diffusion pump group, molecular pump and other vacuum systems can be selected. |
| Temperature controller | Adopting advanced temperature instruments, 30 segment programs can be set, with high temperature control accuracy,SSR control, PID parameter self-tuning function; program temperature rise, program heat preservation, program cooling |
|
Standard Accessories Quartz tube|SS flange|vacuum pump|Thermal gloves | Crucible Tongs | Thermocouple | User Manual |Tools | |
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| Certification: CE, ISO, SGS ect, more than 30 patent certifications | ||||
| Warranty: One-year warranty (excluding wearing parts) and long-term technical support |
Product details
CVD tube furnace
Product Application
Be used in a wide range of CVD tube furnace
Laboratory
Metal
Ceramic
Electronics
Chemical
Glass
Company introduction
CVD tube furnace is a professional equipment for heat treatment. Many new equipment, new technologies and new functions in the world need us to research and develop. The high temperature heat treatment electric furnace produced by our company exists for this purpose. This is a great project loved by both at home and abroad.
Professional team
29,000+ experts worldwide
Senior project managers effectively control all aspects of the project
7x24 hours delivery
Located in 27 cities around the world,with 50 delivery centers,providing 200+ languages,7x24 hours delivery capacity,is the best partner for enterprise globalization
834M
Total Freelancer
732M
Positive Review
90M
Order recieved
236M
Projects Completed
Certification
Honor and qualification
Official certification, professional after sales service.
CE
CE
CE
ISO9001
SGS
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