Products Description
1200 Degree 3 Zones High Vacuum CVD Tubular Furnace features three independent temperature control zones for homogeneous heating, matched full high vacuum pumping system and multi-channel gas distribution device. Split openable furnace structure & quartz tube support CVD, annealing, sintering and thin film deposition under high vacuum or protective atmosphere. Intelligent PID temperature control with safety protection, ideal lab equipment for semiconductor, nanomaterials, new energy material research.
Technical parameters
1200 Degree CVD 3 zones High vacuum Tubular Furnace
| Model | SK2-XY-12TPT3 |
| Max.design(℃) | 1200 |
| Working temperature(℃) | 0-1100 |
|
Tube diameter(mm) D x W x H (mm) |
80mm |
| Heating zone length(mm) | 200+200+200mm |
| Voltage(V) | 220V 1phase |
| Thermocouple type | K |
| Max.vacuum | 10Pa |
| Heating rate | 0-20C/min |
| Temp.Precision | ±1℃ |
| Furnace chamber material | 1430℃ grade Alumina ceramic firber refractory chamber |
| Inlet gas/Atmosphere | 3-way float air intake system, maximum positive pressure not exceeding 0.02Mpa |
| Gas control | The product in the picture has an air inlet and an exhaust hole with a ball valve. Both ends can be connected to a vacuum pump or a flow meter can be added. |
| Vacuum system | Two-stage rotary vane pump Ultimate pressure: 5*10^-2 Pa Maximum vacuum of the furnace: 10 Pa Sealed connections using bellows, ball valves, and clamps |
| Sealing way | The equipment casing is made of carbon steel and 304 stainless steel flange, which is openable and easy to install and remove. The casing is resistant to oxidation, acid and alkali, and has double sealing. |
| Temperature control security | Adopts touch screen control, three-way independent temperature control, USB interface can export all stored data, and multiple programs can be saved. Each program can set 50 sets of temperature and time. |
| Temperature controller | Touch screen model. Adopting advanced temperature instruments, 50 segment programs can be set, with high temperature control accuracy,SSR control, PID parameter self-tuning function; program temperature rise, program heat preservation, program cooling |
|
Standard Accessories Quartz tube|SS flange|vacuum pump|Thermal gloves | Crucible Tongs | Thermocouple | User Manual |Tools | |
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| Certification: CE, ISO, SGS ect, more than 30 patent certifications | ||||
| Warranty: One-year warranty (excluding wearing parts) and long-term technical support |
Product details
Company introduction
We are High temperature furnace experts
The company is recognized as a world leader in lab high temperature electric furnace design and offers products and services of exceptional quality.
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1K +Completed Projects1k complete work
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30 +Our ExpertExpert high temperature furnace
Certification
Honor and qualification
Official certification, professional after sales service.
CE
CE
CE
ISO9001
SGS
Precautions for use:
The gas pressure in the furnace tube cannot be higher than 0.02MPa
·Due to the high gas pressure inside the gas cylinder, a pressure reducing valve must be installed on the gas cylinder when the gas is introduced into the furnace tube. To ensure safety, it is recommended to use a pressure lower than 0.02MPa. It is recommended to purchase a pressure reducing valve from our company. The range of our company's pressure reducing valve is 0.01MPa-0.1MPa, which will be more accurate and safe when used. When the furnace body temperature is higher than 1000℃, the furnace tube cannot be in a vacuum state, and the gas pressure in the furnace tube must be equivalent to atmospheric pressure.
·The gas flow rate entering the furnace tube must be less than 200SCCM to avoid the impact of cold air flow on the heated quartz tube.
·The long-term use temperature of the quartz tube is <1100℃.
·For the experiment of sample heating, it is not recommended to close the exhaust valve and the air inlet valve at the flange end of the furnace tube. If you need to close the gas valve to heat the sample, you need to pay attention to the pressure gauge at all times. If the pressure reading is greater than 0.02MPa, you must immediately open the air relief valve to prevent accidents (such as furnace tube rupture, flange flying out, etc.)
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